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Cleaning of parts
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All production parts are cleaned vacuum-proof in special FMB laboratories.

Surface contaminants could have strong influence on final pressure, residual gas composition  and other properties of the vessel. According to customers requirements FMB offers different UHV-
compatible cleaning qualities:

1. Removal of contaminants that influence the pressure,
2. additional removal of contaminents sticking on the chamber inner walls and
3. additional reduction of paricles for clean room applications.

FMB is able to clean almost all vacuum compatible materials using approved material specific cleaning procedures.
The materials most frequently cleand are different grades of  stainless steel, aluminium and copper, titanium and ceramics.

The entire cleaning and transportation to the next preparation step is done in-house and on schedule to reduce the risk of recontamination during packing, transport and unpacking to a minimum. The cleaned components meet the high requirements in terms of cleanness and
purity by conducting assembly in separate, low-particle-count or clean rooms.

FMB has the following infrastructure for cleaning purposes available:

Precleaning:
• Rinsing station with high pressure cleaner;
• Ultrasonic bath (LWH) 2500 x 620 x 600 mm³;
• Circulating air dryer (LWH) 1500 x 620 x 600 mm³;
• Overhead crane to handle heavier/bigger parts;
• Supply of hot and cold decalcinated water.

Standard UHV-cleaning (after pre-cleaning):
• Ultrasonic bath for stainless steel (LWH) 4000 x 800 x 800 mm³;
• Ultrasonic bath for Aluminium (LWH) 5000 x 500 x 500 mm³;
• Ultrasonic bath for Copper (LWH) 5000 x 500 x 500 mm³;
• Combined rising and dip tank (LWH) 5000 x 500 x 500 mm³ filled with demineralized water;
• Circulating air dryer (LWH) 4000 x 800 x 800 mm³;
• Overhead cranes to handle heavier/bigger parts;
• Disinfector for small parts running with ultra pure (full demineralized) water.
• Supply of demineralized and ultra pure water.

Surface and particle reduced cleaning (after standard UHV-cleaning):
• Cleaning under clean room conditions ISO 5;
• Rinsing station (LWH) 5000 x 500 x 500 mm³ filled with full demineralized water;
• Conductance rising station (LWH) 5000 x 500 x 500 mm³ filled with full demineralized water;
• Circulating air dryer with HEPA (high efficiency particulate air) filter (LWH) 5000 x 500 x 500 mm³;
• Overhead crane to handle heavier/bigger parts;
• Supply of ultra pure water;
• Equipment for registered particle counting
• Equipment for ultra pure water conductance measurement .

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Download this file (UHV-compatible cleaning_Version4.pdf)UHV-compatible cleaningCleaning